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ALEMAN-ARCE, M.A. [Author]
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Abarca-Jiménez, G.S. et al.
Surface micromachining of a micro electromechanical inertial transducer based on commercially available Floating Gate Transistor technology
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Superf. vacío
, Sept 2018, vol.31, no.3, p.48-51. ISSN 1665-3521
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Mendoza-Acevedo, S. et al.
Improved method to reduce interfacial defects in bonding polydimethylsiloxane layers of microfluidic devices for lab-on-chip applications
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Superf. vacío
, June 2017, vol.30, no.2, p.25-29. ISSN 1665-3521
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Munguía-Cervantes, J.E. et al.
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Young's modulus measurement from microcantilever beams using a calibrated stylus profiler
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Superf. vacío
, Mar 2017, vol.30, no.1, p.10-13. ISSN 1665-3521
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