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Ibarra-Villegas, F. J. et al.
Analysis of MEMS structures to identify their frequency response oriented to acoustic applications
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Superf. vacío
, 2015, vol.28, no.1, p.12-17. ISSN 1665-3521
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Ibarra-Villegas, F. J. et al.
Design of capacitive MEMS transverse-comb accelerometers with test hardware
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Superf. vacío
, Mar 2013, vol.26, no.1, p.4-12. ISSN 1665-3521
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