Servicios Personalizados
Revista
Articulo
Indicadores
- Citado por SciELO
- Accesos
Links relacionados
- Similares en SciELO
Compartir
Journal of applied research and technology
versión On-line ISSN 2448-6736versión impresa ISSN 1665-6423
J. appl. res. technol vol.7 no.2 Ciudad de México ago. 2009
Capacitive MEMS accelerometer wide range modeling using artificial neural network
A. Baharodimehr1, A. Abolfazl Suratgar*2, H. Sadeghi3
1 Department of Electrical Engineering, Arak University, Arak, Iran.
2 Department of Electrical Engineering, Tehran Polytechnic University, Tehran, Iran. *asuratgar@araku.ac.ir, TEL: +988612232813, FAX:+988612225946.
3 Department of Physics, Arak University, Arak, Iran.
ABSTRACT
This paper presents a nonlinear model for a capacitive microelectromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the foldedflexure spring. To solve this equation, we use the FEA method. The neural network (NN) uses the LevenbergMarquardt (LM) method for training the system to have a more accurate response. The designed NN can identify and predict the displacement of the movable mass of accelerometer. The simulation results are very promising.
Keywords: Accelerometer, MEMS, cubic stiffness, neural network.
RESUMEN
Este trabajo presenta un modelo no lineal para un acelerómetro microelectromecánico de tipo capacitivo (MEMA). Asimismo, en él se desarrollan parámetros de sistema de el acelerómetro utilizando el efecto del término cúbico del resorte de flexion plegado. Para resolver esta ecuación, usamos el método FEA. La red neuronal (RN) usa el método LevenbergMarquardt (LM) para entrenar al sistema a fin de que tenga una respuesta más exacta. La RN diseñada puede identificar y predecir el desplazamiento de la masa móvil del acelerómetro. Los resultados de la simulación son muy prometedores.
Palabras clave: Acelerómetro, MEMS, rigidez cúbica, red neuronal.
DESCARGAR ARTÍCULO EN FORMATO PDF
References
[1] W. L. Davis, "Mechanical Analysis and Design of Vibratory Micromachined", Ph.D. thesis, University of California, Brekeley, 2001. [ Links ]
[2] P. Malatkar, "Nonlinear Vibrations of Cantilever Beams and Plates", Ph.D thesis, Faculty of the Virginia Polytechnic Institue and State University,2003. [ Links ]
[3] Q. Jing, "Modeling and Simulation for Design of Suspended MEMS", Ph.D. thesis, Carnegie Mellon University, 2003. [ Links ]
[4] S.V. Iyer, "Modeling and Simulation of Nonidealities in a Zaxis CMOSMEMS Gyroscope", Ph.D. thesis, Carnegie Mellon University, 2003. [ Links ]
[5] J. Bienstman, R. Puers, and J. Vandewalle, "Periodic and chaotic behavior of the autonomous impact resonator", IEEE Proc. MEMS'98, pp.562567,1998. [ Links ]
[6] A.F. ElBassiouny and M. Eissa, "Dynamics of a singledegreeoffreedom structure with quadratic, cubic and quartic nonlinearities to a harmonic resonance", APPL. Math. Comput.,vol. 139,pp.121, 2003. [ Links ]
[7] S.K. De and N.R. Aluru,"Complex Nonlinear Oscillation in Electrostatically Actuated Microstructures",Journal of Microelectromechanical Systems,Vol. 15, NO. 2, 2006. [ Links ]
[8] S. Rekuc, "Optimization for a Robust MEMS Accelerometer Spring", Final project, Georgia institute of technology, The G. W. Woodroof School of Mechanical Engineering, 2003. [ Links ]
[9] D. P. Beach, "Design of an Open Loop Capacitive Accelerometer", Minithesis, Indiana State University, The College of Technology,2004. [ Links ]
[10] T. Veijola, H. Kuisma and J. Lahdenpera, "Compact LargeDisplacement Model for a Capacitive Accelerometer", MSM'99, pp. 218221, 1999. [ Links ]
[11] V. Gupta, "Approaches to Synthesis of a CMOS Accelerometer", M.Sc. Thesis, Carnegie Mellon University, 2000. [ Links ]
[12] G. K. Fedder, "Simulation of Microelectromechanical Systems", Ph.D thesis, University of California, Berkeley, 1994.1. [ Links ]
[13] G. Zhang, "Design and Simulation of a CMOSMEMS Accelerometer", M.Sc. thesis, Carnegie Mellon University,1998. [ Links ]
[14] A. K. Sharma and A. Teverovksy, "Evaluation of ThermoMechanical Stability of COTS DualAxis MEMS Accelerometers for Space Applications", Component Technology and Radiation Effects (Code 562), 2000. [ Links ]
[15] H. Luo, "Integrated Multiple Device CMOSMEMS IMU Systems and RF MEMS Applications", Ph.D thesis, Carnegie Mellon University,2002 [ Links ]
[16] A. A. Suratgar and M. B. Tavakoli and A. Hossenabadi, "Modified LevenbergMarquardt neural network training ", Enformatika , 2005. [ Links ]
[17] A. A. Suratgar and A. R. Bahadorimehr and H. Sadeghi and M. Dousti, "Nonlinear Modeling of a Capacitive MEMS Accelerometer Using Neural Network", in proceedings of EMERGING MECHANICAL TECHNOLOGY Macro to Nano conference , Delhi, India, 2007. [ Links ]