Abstract

AGUILAR, J.F.. Confocal profiling of grooves and ridges with circular section using the divided aperture technique. Rev. mex. fis. [online]. 2005, vol.51, n.4, pp.420-425. ISSN 0035-001X.

The divided-pupil technique for the simulation of confocal imaging is applied to remove those artifacts appearing due to the symmetry of the object. A rigorous treatment is used to model the imaging system which is a two-dimensional confocal microscope, working in reflection mode. Since the geometry of the associated electromagnetic problem is 2-D, the objects analyzed are highly symmetric and cylindrical. The advantages and limitations of this technique are discussed and shown by means of examples.

Keywords : Confocal microscopy; light scattering; optical profilometry.

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