Abstract

REHDER, G  and  CARRENO, M.N.P. Ciliary motion in PECVD silicon carbide and silicon oxynitride microstructures. Rev. mex. fis. [online]. 2006, vol.52, suppl.2, pp.48-49. ISSN 0035-001X.

The development of arrays of amorphous hydrogenated silicon carbide (a-SiC:H) and silicon oxynitride (SiO_xN_y) based microstructures that produce ciliary motion is presented. The arrays are fabricated by bulk micromachining of c-Si substrates and they are completely based on materials obtained by a low temperature PECVD (plasma enhanced chemical vapor deposition) technique. Chromium metal is sandwiched between these two materials and it is used as a contact metal and heating element. The ciliary motion is obtained by applying an external synchronized electrical voltage to the cantilevers, which move due to thermal expansion caused by the Joule Effect.

Keywords : MEMS; silicon carbide; Joule effect.