Abstract

LECHUGA, L. M; TAMAYO, J; CALLE, A  and  DOMINGUEZ, C. Nanobiosensors based on optoelectronic and nanomechanical transducers for genomic and proteomic applications. Rev. mex. fis. [online]. 2006, vol.52, suppl.2, pp.94-98. ISSN 0035-001X.

We show the design, fabrication and testing of micro/nanobiosensor devices based on highly sensitive optoelectronic and nanomechanical transducers. Most of the devices are fabricated by standard Silicon CMOS microelectronics technology according to a precise design for achieving a high sensitivity for biosensing applications. Three biosensors have been developed: (a) a Surface Plasmon Resonance biosensor, (b) an integrated, Mach-Zehnder micro/nano interferometer device based on optical waveguides, and (c) nanomechanical biosensors based on microcantilevers.

Keywords : Biosensor; nanotechnology; optoelectronics.