Abstract

CASTRO-COLIN, M et al. Multipactor suppressing titanium nitride thin films analyzed through XPS and AES. Rev. mex. fis. [online]. 2008, vol.54, suppl.1, pp.36-41. ISSN 0035-001X.

Cathodic-magnetron-deposited titanium nitride films were grown on anodized aluminum substrates and studied via AES and XPS spectro-scopies to determine their depth-dependence composition. As it is well known, the native oxide grown on aluminum does not make the substrate impervious to radio frequency damage, and typically a thin film coating is needed to suppress substrate damage. In this article we present the profile composition of titanium nitride films, used as a protective coating for aluminum, that underwent prior conditioning through anodization, observed after successive sputtering stages.

Keywords : Thin film; magnetron deposition; multipactor; XPS; AES; anodization.