Abstract

TECPOYOTL-TORRES, Margarita; CABELLO-RUIZ, Ramón  and  VERA-DIMAS, José Gerardo. Design and simulation of an optimized electrothermal microactuator with Z-shaped beams. Acta univ [online]. 2015, vol.25, n.3, pp.19-24. ISSN 2007-9621.  https://doi.org/10.15174/au.2015.774.

The displacement of the central shuttle of a Z-shape chevron actuator can be calculated using a developed approach from other authors. Who demonstrated that the actuators with this geometry offer a larger displacement compared with V-shape actuators. Z-shape offers a larger stiffness and output force for the case of only one arm. This paper is focused on the optimization of the Z-shaped beams of a chevron actuator of eight beams, which seeks to increase the previously described response. The structure is designed in parametric solid modeling 3D software Autodesk Inventor, and simulated by finite element method in Ansys 15.0. These simulations were implemented considering several modifications on the length of the Z-shaped beams in order to choose the most appropriate length. The electric potential applied in all cases was from 0.2 V up to 5 V. The Z-shape length of the arms for the case of the optimized Z-shape actuator increases the shuttle's displacement in approximately 50% compared to V-shape actuator, and 38% compare to the original Z-shape. Analytical adjusted approach is extremely matched with the simulations results. Length of the Z-shape beam is the determinant factor of the displacement. The low stiffness of the optimized Z-shape actuator (89% lower than the original V-shape and 58% compared to Z-shape) can allow its use as load sensor.

Keywords : MEMS; chevron; electrothermal; displacement.