Abstract

SALAZAR-MIRANDA, D. et al. Refractive index modulation of SU-8 polymer optical waveguides by means of hybrid photothermal process. Rev. Mex. Ing. Quím [online]. 2010, vol.9, n.1, pp.85-90. ISSN 1665-2738.

This paper describes the fabrication and characterization of multimode polymer optical waveguides obtained using a SU-8-2005 polymer by means of photolithographic process. Critical information about refractive index modulation of polymer waveguides as function of fabrication parameters as pre-baked and ultraviolet exposure times is presented. Physical properties of the waveguides were determined by means prism-coupling technique, optical and SEM microscopy.

Keywords : optical waveguides; polymer; photolithography; modulation; refractive index.