Abstract

GRANDA-GUTIERREZ, E. E. et al. Superficial characterization of a TiO₂ - TiN_0.26 layer implanted in Titanium. Superf. vacío [online]. 2007, vol.20, n.3, pp.11-16. ISSN 1665-3521.

Samples of pure Titanium were treated by means a PIII process using a dense DC glow discharge with different mixtures of nitrogen-oxygen and oxygen pure. The surface of treated samples was analyzed by means of different techniques such as X-ray diffractometry, Scanning Electron Microscope, Vickers Microhardness tester and profilometer. We conclude that the modified surface is formed by TiN_0.26 diffused into TiO₂ in rutile phase, forming a uniform layer up to 10 μm in thickness and whose resultant microhardness is almost five times greater than that of untreated titanium. Some control over the superficial parameters is taken by varying the proportion of nitrogen-oxygen at a pressure of 1x10^-2 Torr (~1.33 Pa), obtaining a thicker layer, a harder surface or a reduced roughness. The identified phases have biocompatible properties, which provide interest in the bioengineering field.

Keywords : Plasma immersion ion implantation; X-ray diffraction; Tribology and hardness; Scanning electron microscopy; Surface modification.