Abstract

AGUILAR-LEYVA, J.; MALDONADO, A.  and  OLVERA, M. de la L.. Aplicación de peliculas delgadas de SnO₂ y SnO₂:Ru como sensores de propano. Superf. vacío [online]. 2012, vol.25, n.2, pp.117-120. ISSN 1665-3521.

In this work we report the sensing properties of undoped and ruthenium-doped tin oxide thin films (SnO₂, SnO₂:Ru) with different thicknesses, in a controlled atmosphere of propane gas (C₃H₈) at different operation temperatures. The films were deposited onto soda-lime glass substrates by the spray pyrolysis technique at different deposition temperatures, namely, 300, 350, 400, and 450°C. All the films were annealed in vacuum at 400°C during 1 h in order to stabilize the surface physical characteristics. The sensing properties of the films were characterized by the surface electrical resistance ratio in a C₃H₈ atmosphere, and air as reference. Maximum sensitivities, on the order of 1.4 and 7.4 were obtained for undoped SnO₂, and, SnO₂:Ru thin films, respectively.

Keywords : Thin films; Semiconductor Oxides; Tin Oxide; Propane Gas Sensors.