Abstract

PARAGUAY-DELGADO, F.; HURTADO-MACIAS, A.  and  SOLIS-CANTO, O.. Zn dopant effect on growth, morphology, texture and mechanical properties of SnO₂ thin films. Superf. vacío [online]. 2018, vol.31, n.1, pp.16-25. ISSN 1665-3521.

When tin oxide thin film is doped with Zn, it grows textured and improves its mechanical properties. The material was synthesized on alkali-free borosilicate glass substrates by spray pyrolysis technique. The elemental composition was determined by X-ray energy dispersive spectroscopy and X-ray photoelectron spectroscopy. The morphology and microstructure of films were examined by electron microscopy techniques, they shown different shapes of crystalline particles according to the dopant content. From X-ray diffraction patterns processed by Rietveld refinement methodology was determine lattice parameters, crystallite sizes and micro strain; it showed that the textural growth of the films depend on the Zn dopant quantity content. The mechanical property was studied as a function of dopants amount, it enhancement due to the texture direction growth. For optimized Zn doped quantity in the film, local measurement of hardness and elastic modulus increased from 12 to 23 GPa and from 137 to 195 GPa, respectively. According to the Zn content, the materials show good correlation between elastic module values and (200) texture growth direction parallel to the substrate.

Keywords : Thin Films; Tin Oxide; Texture; Mechanical Property.

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