Servicios Personalizados
Revista
Articulo
Indicadores
- Citado por SciELO
- Accesos
Links relacionados
- Similares en SciELO
Compartir
Revista mexicana de física
versión impresa ISSN 0035-001X
Rev. mex. fis. vol.55 no.5 México oct. 2009
Investigación
Bode plots applied to microscopic interferometry
J.M. Flores, M. Cywiak*, M. Servín, and L. Juárez
Centro de Investigaciones en Óptica, A.C., Loma del Bosque 115, Lomas del Campestre, León, Guanajuato, 37150 México, * email: moi@cio.mx
Recibido el 16 de junio de 2008
Aceptado el 7 de septiembre de 2009
Abstract
We describe a technique for using Bode plots in microscopic interferometry, in particular as applied to the three Gaussian beam interferometer recently reported in the literature. The technique is used in a similar manner to its application to an electric or electronic system in finding its frequency response. The Bode response is used to deconvolve the raw data obtained directly from the interferometer to compensate for the data in frequency, making it possible to obtain more realistic profiles of the samples under test. We apply this technique to obtain profiles of the inner reflective layers of two optical types of surfaces for data storage commercially available, namely, the compact disk (CDR) and the digital versatile disk (DVDR). We report the experimental results of radial scans of these devices without data marks, before and after applying the transfer function of the system. The measurements are obtained by placing the devices with the polycarbonate surfaces so as to aim the probe beam of the interferometer at them, taking advantage of the vertical depth discrimination of the microscope. We show that the resulting profiles, obtained across the Polycarbonate layer, measured with this interferometer, give valuable information of the real track profiles, making the combination of the Bode plots with this interferometer a suitable tool for quality control of the surface storage devices.
Keywords: Bode transform; gaussian beam; interferometry.
Resumen
Describimos una técnica que permite utilizar las gráficas de Bode en interferometría microscópica, en particular aplicada al interferómetro de tres haces Gaussianos recientemente reportado en la literatura. La técnica es utilizada de una manera similar a la forma en que se hace para encontrar la respuesta en frecuencia de un sistema eléctrico o electrónico. La respuesta de Bode es utilizada para calcular la deconvolución de los datos crudos obtenidos directamente del interferómetro para compensar los datos en frecuencia, permitiendo obtener un perfil mas realista de las muestras bajo prueba. Aplicamos la técnica para obtener los perfiles de las superficies reflectoras internas de dos dispositivos ópticos comercialmente disponibles para almacenamiento de datos, el disco compacto (CDR) y el disco digital versátil (DVDR). Reportamos resultados experimentales de una exploración radial de estos dispositivos sin datos almacenados, antes y después de aplicar la función de transferencia del sistema. Las mediciones son obtenidas colocando los dispositivos con la superficie de Policarbonato apuntando al haz de prueba del interferómetro, aprovechando la ventaja de la discriminación de profundidad del microscopio. Mostramos que los perfiles resultantes, obtenidos a través de la capa del Policarbonato, medidos con este interferómetro, proporcionan información valiosa de los perfiles reales de las pistas de estos dispositivos, por lo que la combinación de Bode aunada al uso de este interferómetro representan una herramienta adecuada para el control de calidad de los dispositivos ópticos de almacenamiento de datos mencionados.
Descriptores: Transformar Bode; haz de Gauss; interferometría.
PACS: 07.60.; 42.79.Vb; 42.87.d
DESCARGAR ARTÍCULO EN FORMATO PDF
Acknowledgments
The authors thank CONACYT for financial support.
References
1. H.W. Bode, "Network Analysis and Feedback Amplifier Design" (Van Nostrand, Princeton, N.J., 1945) Chap. 13, p.286; Chap. 15, p.337. [ Links ]
2. Z. Zalevsky and D. Mendlovic, Appl. Opt. 34 (1995) 828. [ Links ]
3. L. Juárez, M. Cywiak, B. Barrientos, and J.M. Flores, Opt. Commun. 268 (2006) 209. [ Links ]
4. L. Juárez, M. Cywiak, M. Servín, and J.M. Flores, Opt. Express 15 (2007) 5277. [ Links ]
5. T. Kikukawa and H. Utsunomiya, Microsc. Microanal. 7 (2001) 363. [ Links ]
6. S. Kai, I. Chun, and D. Ping, Opt. Express 14 (2006) 4452. [ Links ]
7. M Yamaguchi et al., Jour. Microsc. 194 (1998) 552. [ Links ]
8. T. Choi and T.D. Milster, Opt. Eng. 45 (2006) 64302. [ Links ]
9. J.H. Coombs and A.H.M. Holtslag, "Scanning optical microscopy: apowerful tool in optical recording," in Optical Data Storage '91, J.J. Burke, T.A. Shull and N. Imamura, eds., Proc. SPIE 1499 (1991)6. [ Links ]
10. T.E. Karis et al., "Verification of tracking servo signal simulation from scanning tunneling microscope surface profiles," in Optical Data Storage '91, J.J. Burke, T.A. Shull and N. Imamura, eds., Proc. SPIE 1499 (1991) 366. [ Links ]
11. B.A. Sexton and G.F. Cotterill, J. Vac. Sci. Technol. A 7, (1989) 2734. [ Links ]
12. M. Mansuripur etal.,App. Opt. 35 (1997) 9296. [ Links ]
13. B. Wolfring, T. Weber, T. MuellerWirts and M. Mansuripur, "VersatestI, a versatile polychromatic dynamic testbedfor optical disks," in Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, F.L. Podio, eds., Proc. SPIE 3806 (1999) 2. [ Links ]
14. J. Butty, D. Kraehenbuehl, and B.J. Bartholomeusz, "Methods for characterization of phase change optical discs," in Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, F.L. Podio, eds., Proc. SPIE 3806 (1999)76. [ Links ]
15. Y. Kashihara, et al., "Simulation study for high density optical disk systems," in Optical Data Storage 2001, T. Hurst and S. Kobayashi, eds.,Proc. SPIE 4342 (2001) 524. [ Links ]
16. W. Ulf, "Local track pitch measuring apparatus and method," US 2004/0081048 A1 (2004) 1. [ Links ]
17. R. Köning et al., "Step height metrology for data storage applications," in Recent Advances in Metrology, Characterization, and Standards for Optical Digital Data Disks, F.L. Podio, eds., Proc. SPIE 3806 (1999) 21. [ Links ]
18. D.A. Chernoff, J.D. Lohr, D. Hansen, and M. Lines, "High precision calibration of a scanning probe microscope (SPM) for pitch and overlay measurements," in Metrology, Inspection, and Process Control for Microlithography XI, S.K. Jones, eds., Proc. SPIE 3050 (1997) 243. [ Links ]
19. R.L. Wilkinson and J.H. Rilum, "DVD Mastering using dye polymer media," in Optical Data Storage '97, H. Birecki and J. Z. Kwiecien, eds., Proc. SPIE 3109 (1997) 160. [ Links ]
20. C.S. Cook, D.A. Chernoff, and D.L. Burkhead, "Automated analysis of data mark microstructure of various media in the optical disc industry," in Optical Data Storage 2000, D.G. Stinson and R. Katayama, eds., Proc. SPIE 4090 (2000) 16. [ Links ]
21. D.L. Burkhead and D.A. Chernoff, "AFM analysis of wobble amplitude," in International Symposium on Optical Memory and Optical Data Storage Topical Meeting (Institute of Electrical and Electronics Engineers, New York, 2002), pp. 359. [ Links ]
22. A. Kuhle, B.G. Rosen, and J. Garnaes, "Comparison of roughness measurement with atomic force microscopy and interference microscopy," Proc. SPIE 5188 (2003) 154. [ Links ]