Resumen

LECHUGA, L.M.; CALLE, A.  y  DOMINGUEZ, C.. Integration of bio, nano, micro and cogno in biosensor devices for human health applications. Superf. vacío [online]. 2005, vol.18, n.4, pp.1-6. ISSN 1665-3521.

The design, fabrication and testing of micro/nanobiosensor devices based on optoelectronics and nanomechanical highly sensitive transducers is shown. Most of the devices are fabricated by standard silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Three biosensors have been developed: (a) a Surface Plasmon Resonance biosensor (b) an integrated Mach-Zehnder interferometer micro/nanodevice based on optical waveguides and (c) nanomechanical biosensors based on microcantilevers. Direct biosensing with all the sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the micro/nano sensors, the microfluidics, the sources, the photodetectors and the CMOS electronics will render in complete lab-on-a-chip microsystems which could be used in field applications.

Palabras llave : MEMS; Biosensor; Silicon DMOS.