Resumen

IBARRA-VILLEGAS, F. J. et al. Analysis of MEMS structures to identify their frequency response oriented to acoustic applications. Superf. vacío [online]. 2015, vol.28, n.1, pp.12-17. ISSN 1665-3521.

Micro-ElectroMechanical Systems (MEMS) structures as well as all physical objects have a natural frequency or frequencies at which they react with a vibration. The natural frequencies depend on both the mass and rigidity of the structure. In this paper the frequency responses of some MEMS structures are analyzed based on the physical parameters of the materials. The design of the analyzed structures is aimed to identify the frequency components of a multi-tone acoustic signal. Specifically the designed structures are meant to be part of an electromechanical spectrum analyzer that emulates the behavior of a human cochlea. Harmonic analysis of the structures is carried out using ANSYS Workbench software. The importance of this work is to validate the use of ANSYS tools for the design of these devices, since for practical purposes the results are very accurate; however, the mathematical design can become very complex due to the geometry of the structures.

Palabras llave : MEMS; Natural frequency; Cochlea; Frequency response; Acoustics.