Resumen

GOMEZ-MENDEZ, E.; POSADA, C. M.  y  JARAMILLO-OCAMPO, J. M.. Development of a bearing-free, low-vibration vacuum chuck for a spin-coating apparatus. J. appl. res. technol [online]. 2020, vol.18, n.1, pp.14-20.  Epub 05-Feb-2021. ISSN 2448-6736.  https://doi.org/10.1016/j.jart.2017.02.005.

This work presents the design and fabrication of two different vacuum chuck systems for a spin-coater apparatus. One of the vacuum chuck designs considered was sealed with toric joints and the other was sealed with bearings. These vacuum chucks were adapted to a DC brushless motor which has a non-perforated shaft. The vacuum chuck with toric joints presented a superior performance when compared to the design with bearings. The best chuck design showed variations in temperature below 1 °C for spin-coating speeds in the range of 100 to 4000 rpm. In all cases, the vibrations of the spin-coating apparatus were measured to be below 1 μm RMS. To test the performance of the spin-coater, photoresist (PR) films were spin-coated at different rotational speeds. At 3000 rpm the measured PR thickness was 0.42 ± 0.02 μm, giving a good match to the data reported by the PR manufacturer.

Palabras llave : Spin coater; vacuum chuck; thin films; photoresist; mechanical design.

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