Resumen

CALDERON, Héctor A.. Transmission electron microscopy to look at atoms: principles and development. Mundo nano [online]. 2020, vol.13, n.25, pp.133-156.  Epub 25-Nov-2020. ISSN 2448-5691.  https://doi.org/10.22201/ceiich.24485691e.2020.25.69649.

Electron microscopy is an important tool in characterizing nanomaterials. In its high resolution mode, it is possible to obtain images of the columns of atoms that make up a sample or if the thickness is a monolayer, images of atoms can be obtained. Normally the product image has specific intensities that require proper interpretation, additionally there is a need to consider the electron beam interaction with the sample. In this work, some important characteristics of high resolution and atomic resolution electron microscopy are described. Examples are given with observations in different materials. The beam-sample interaction is given special attention in order to avoid sample damage by an intense electron beam.

Palabras llave : electron microscopy; atomic resolution; spatial resolution; simple-beam interaction; electron dose.

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