Resumen

ALCANTARA I., Salvador et al. Películas de ZnO piezoeléctricas depositadas por Spray Pirolisis US. Superf. vacío [online]. 2008, vol.21, n.4, pp.6-9. ISSN 1665-3521.

Deposited ZnO by spray pyrolysis, is very interesting due to the large number of applications and simplicity of the technique. By using the ultrasonic humidifier instead of pneumatic spray, it is possibe to produce a films with a better quality and control. On the films ZnO obteined, we found piezoelectric effect; this paper describes this technique and how are founded this effect and some of the results. The purpose of these films are for actuator and detection of micromachining cantilever or diphragm application.

Palabras llave : ZnO; Ultrasonic spray pyrolysis; Piezoelectric; Ultrasonic humidifier.