Resumen

ALCANTARA I., Salvador et al. Resonador sensor de masa: desarrollo y métodos de medición. Superf. vacío [online]. 2010, vol.23, n.3, pp.1-5. ISSN 1665-3521.

The cantilevers are one of the most simple mechanical resonator structure used to detect a mass variations from its resonance frequency. In microelectronic field, is possible to fabricate this kind of detector with the whole electronic circuit on the same substrate, extending the applications even in biological and chemical environment. The performance of these sensors depends of its dimensions, material, excitation electronic stage, and displacement amplitude. In this work, we present the fabrication process to obtain a sensor with dimensions of 100x20x15 μm from silicon semiconductor technology and bulk micromachining techniques. Also, we describe the characterization method through a Matlab data acquisition system and IR sensors, in order to obtain the frequency resonance and amplitude of these cantilevers with resolutions of Hz and μm respectively. The results obtained show that the methods proposed are useful to detect mass variations from deposited films or adsorbed materials on these silicon cantilevers in orders to μg.

Palabras llave : resonator; Cantelever; Resonance; Sensor; Mass; Microelectronic; Bulk micromachining.

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