Resumen

RINCON-JARA, R. I; AMBROSIO, R.  y  MIRELES, J.. Análisis y caracterización de un acelerómetro capacitivo fabricado con tecnología polymump's. Superf. vacío [online]. 2010, vol.23, n.3, pp.26-31. ISSN 1665-3521.

This work presents the analysis and characterization of a capacitive accelerometer fabricated with PolyMUMP's technology. The structure contains a proof mass which is suspended between fixed rigid electrodes to sense differential capacitance measurement. The accelerometer structure was simulated by the software Coventorware. The simulation and modeling results suggested the use of low detection capacitance system in the range offF (fempto Farads) resolution for dynamics conditions, which is an engineering problem and non-simple connectivity. Also, this paper describes a technique for calculating the operation parameters of the accelerometer using electrical and mechanical test stimulus. The most important figures of merit of the device such as: sensitivity and the Non-linearity are presented. The results showed a value of sensitivity by the change of voltage in relation to the gravity of 1.4mV/g and the non-linearity was better than 0.8%, with a sensing range of 12 g's. The operation parameters of our design are compared with the state of the art and data reported in literature, which indicated that it is very promising for application in automotive systems.

Palabras llave : MEMS (Micro Electro-Mechanical System); Accelerometer seismic mass; Resonant frequency; Capacitive sensors.