Resumen

CASTREJON-SANCHEZ, V.H.; CAMPS, Enrique  y  CAMACHO-LOPEZ, M.. Quantification of phase content in TiO₂ thin films by Raman spectroscopy. Superf. vacío [online]. 2014, vol.27, n.3, pp.88-92. ISSN 1665-3521.

Recently, it has been reported that TiO₂ with mixture of phases (anatase/rutile) exhibit higher photocatalytic activity than TiO₂ with pure anatase phase. Therefore, the production and correct quantification of the ratio of phases becomes an important task. In this work, anatase TiO₂ thin films were obtained by the DC reactive magnetron sputtering technique. TiO₂ with mixture of phases (anatase/rutile) were prepared by thermal annealing of the as-deposited thin films. The value of the anatase/rutile ratio in the titanium dioxide thin films was estimated using Raman spectroscopy. Additionally, it is reported the dependence of the bandgap of the TiO₂ thin films as a function of the anatase/rutile ratio. The band gap of the TiO₂ thin films was determined from diffuse reflectance measurements.

Palabras llave : Anatase-rutile TiO₂; Raman spectroscopy; Reactive sputtering.