Resumen

MIRELES, Jose; GOMEZ, Maribel  y  GARCIA, Miguel A.. Packaging investigation and study for optical interfacing of micro components with optical fibers - Part I. Superf. vacío [online]. 2007, vol.20, n.1, pp.21-33. ISSN 1665-3521.

An investigation study concerning optical fiber alignment and micro-mirror performance in MOEMS devices is being reviewed in this paper. The central attention of the study is the analysis of optical fibers positioning, alignment, bonding, optical improvements, coupling to micro-lenses for beam collimation and waveguides. Also, we highlight features concerning coupling of optical fibers to micro-mirrors while searching for the proper alignment and characterization of the optical beam reflection, its tolerances, relative positioning, and attachment techniques.

Palabras llave : Micro Electro Mechanical Systems (MEMS); Packaging; Optical interconnects; Opto Electronics.