Revisión

Óptica difractiva: una revisión al diseño y construcción de sistemas ópticos empleando lentes difractivas

J. Castro-Ramos, S. Vázquez-Montiel, J. Hernández-de-la-Cruz, O. García-Lievanos y W. Calleja-Arriaga

Instituto Nacional de Astrofísica Óptica y Electrónica, Apartado Postal 51 y 217, 72000, Puebla, Pue. México,
e-mail: jcastro@inaoep.mx

Recibido el 20 de diciembre de 2005
Aceptado el 10 de noviembre de 2006

Resumen

Hoy en día la optica difractiva está teniendo un gran auge en la construcción de sistemas ópticos formadores de imagen, debido principalmente a las ventajas que se obtienen en la calidad de la imagen y al empleo de una menor cantidad de elementos ópticos. Así, los elementos ópticos difractivos (EOD) han alcanzado un gran impacto que va en incremento día a día; una clara muestra son los artículos científicos de investigación y divulgación [1-3] que han aparecido por parte de compañías transnacionales como CANON, KODAK y NYKON, entre otras, las cuales mencionan una gran cantidad de proyectos en los que planean construir y evaluar cámaras digitales, proyectores de cristal líquido y otros equipos formadores de imagen, todo ello mediante el empleo de EOD. Bajo el contexto anterior se plantea en este artículo hacer una revisión de los fundamentos en los que se basa la óptica difractiva, los métodos que se utilizan para diseñar los sistemas ópticos empleando elementos ópticos difractivos, así como la descripcion de las técnicas más comunes para su fabricación y el empleo que tienen estos sistemas opticos.

Descriptores: Elementos ópticos difractivos; microcomponentes ópticos; diseño ópticos; litografía ópticos.

Abstract

Nowadays diffractive optics in the fabrication of imaging optical systems is having a boom due to many advantages over the image quality and the use of less optical elements. Diffractive Optical Elements (DOE's) are showing a huge growth in the optical industry and it goes in increasing day to day. Transnational companies like CANON, KODAK and NYON refer to great quantity of projects for building imaging equipment, digital cameras; liquid crystal projectors among others by means of using DOE's, already their results have been appearing in a lot of published papers and technical reports [1-3]. Due to above written, a review on fundamental concepts in which the diffractive optics is based is explained. The methods employed to design optical systems by using diffractive optical elements are check over, the most common techniques to produce such elements are also reviewed. Finally some applications based on DOE's are explored in this paper.

Keywords: Diffractive optical elements; integrated optics; optical design; photolithography.

PACS: 01.30.Rr; 07.60.-j; 42.15.Eq; 42.0.Lx

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Agradecimientos

Agradecemos a Ignacio Juárez y Mauro Landa la ayuda proporcionada. SVM agradece al CONACYT por el apoyo otorgado mediante proyecto 40086-F. JCR agradece también al CONACYT el apoyo otorgado mediante proyecto 5880-J.

References

1. K. Bergman, N. Bonadeo, I. Brener and I. Chiang, Test, Integration and Packaging of MEMS 2001, Proc. SPIE 4408 (2001) p.2.        [ Links ]

2. W. Golstsos and M. Holz, Opt. Eng. 29 (1990) 1392.        [ Links ]

3. J.R. Leger, D. Chen, and G. Mowry, Appl. Opt. 34 (1995) 2498.        [ Links ]

4. E. Hecht, "Optica", 3^th ed. (Addison Wesley, España, 2000) p. 496.        [ Links ]

5. L d'Auria, J.P Huignard, A.M Roy, and E. Spitz, Opt. Comm. 5 (1972) 232.        [ Links ]

6. J.J. Clair and C.I Abitbol, Progress in Optics XVl, E. Wolf, Ed. North Holland, Amsterdam (1978) p. 73.        [ Links ]

7. W.B. Veldkamp and G.J. Swanson, S.H Lee, Ed. Proc. SPIE 437 (1983) 54.        [ Links ]

8. G.J Swanson, "Binary optics technology: the theory and design of multi-level diffractive optical elements," MIT Lincoln Laboratory Report 854 Massachusetts Institute of Technology, Cambridge, MA (1989).        [ Links ]

9. W.C Tian, J.W. Weigold, and S.W. Pang, J. Vac. Sci. Tech. B. 18 (2000) 1890.        [ Links ]

10. J.W. Goodman, Introduction to Fourier Optics, 2^nd ed. (McGraw-Hill, San Francisco 1996).        [ Links ]

11. M. Born and E. Wolf, Principles of optics, 7^th ed. (Cambridge, United Kingdom 1999).        [ Links ]

12. R.N. Bracewell, The Fourier Transform and its applications, 3^rd ed. (McGrawHill, USA, 2000).        [ Links ]

13. Lambda Research Corporation, OSLO Optics Software for Layout and Optimization, Optics Reference, Version 6.1, Littleton, MA, USA (2001).        [ Links ]

14. P.A. Bou, "Placas zonales: Obtención de una lente kinoform por métodos holográficos", Tesis Doctoral, Universidad de Valencia, Facultad de Física, Valencia España (1983).        [ Links ]

15. W.C., Sweatt, JOSA 67 (1977) 803.        [ Links ]

16. E. Hecht, Optica, 3^th ed. (Addison Wesley, España 2000) p. 151.        [ Links ]

17. A. Offner, JOSA 56 (1966) 1509.        [ Links ]

18. Martellucci and A.N. Chester, Diffractive optics and optical Microsystems (Plenum press, New York 1997).        [ Links ]

19. M. Young, J.O.S.A. 62 (1972) 972.        [ Links ]

20. W.T. Welford, Aberrations of the symmetrical optical system (Academic Press Inc, London, 1974).        [ Links ]

21. D.A. Buralli and G. Michael Morris, Appl. Opt. 30 (1991) 2151.        [ Links ]

22. J. Turunen and F. Wyrowski, Diffractive optics for industrial and commercial applications (Akademie Verlag, Berlin 1997).        [ Links ]

23. T. Stone and N. George, Appl. Opt. 27 (1988) 2960.        [ Links ]

24. G.M. Morris, Appl. Opt. 20 (1981) 2117.        [ Links ]

25. T. Fujita, H. Nishihara, and J. Koyama, Opt. Lett. 6 (1981) 613.        [ Links ]

26. T. Fujita, H. Nishihara, and J. Koyama, Opt. Lett. 7 (1982) 578.        [ Links ]

27. M.T. Gale and K. Knop, in Industrial Applications of Laser Technology, W.F. Fagan, Ed., Proc. SPIE 398 (1938) 347.        [ Links ]

28. M.T. Gale et al., Appl. Opt. 32 (1993) 2526.        [ Links ]

29. J.P.B. Owen, R.L. Michaels, and C.G. Blough, Appl. Opt. 36 (1997) 8970.        [ Links ]

30. M.T. Gale, in Micro-optics: Elements, Systems, and applications, H.P Herzig, Ed., Taylor and Francis, London, (1997) p. 87.        [ Links ]

31. A.G. Poleshchuk, Optoelectron. Instrum. Data Process 1 (1992) 67.        [ Links ]

32. Borreli and F. Nicholas, Microopitcs technology, fabrication and applications of lens array and devices (Marcel Dekker, Newyork, USA, 1999).        [ Links ]

33. T.J. Suleski and D.C. O'Shea, Appl. Opt. 34 (1995) 7507.        [ Links ]

34. W. Daschner, P. Long, M. Larsson, and S.H. Lee, J. Vac. Sci. Technol. B 13 (1995) 2729.        [ Links ]

35. S. Wolf and R.M. Tauver, Silicon Processing for the VLSI Era, Vol. 1: Process Technology. (Eattice Press, Sunset Beach, CA 1986).        [ Links ]

36. D.J. Elliot, Microlithography Process Technology for IC Fabrication. (McGraw-Hill, New York 1998).        [ Links ]

37. P. Rai-Choudhury, Handbook of Microlithography Micromachining, and Microfabrication, Vol. 1: Microlithography. SPIE Press, Bellingham, WA (1997).        [ Links ]

38. J.R. Sheats and B.W. Smith, Microlithography Science and Technology. (Marcel Dekker, New York 1998).        [ Links ]

39. H. J. Levinson, Principles of Lithography. (SPIE Press, Bellingham,WA 2001).        [ Links ]

40. J. Suleski, in Encyclopedia of Optical Engineering, R.G. Driggers, Ed., Marcel Dekker, New York, (2003) p. 374.        [ Links ]

41. M.J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2^nd ed. (CRC Press LLC, Boca Raton, FL, 2002).        [ Links ]

42. M.T. Duignan, in Diffractive Optics, 11 of OSA Technical Deges Series. Optical Society of America Washington, DC (1994) 129.        [ Links ]

43. C. Londoño, Design and fabrication of surface relief diffractive optical elements, or kinoforms, with examples for optical athermalization, Ph.D. thesis, Tufts University, Medford, MA (1992).        [ Links ]

44. T.T. Saito, Opt. Eng. 17 (1978) 570.        [ Links ]

45. M.J. Riedl and J.T. McCann, in infrared Optical Design and fabrication, R. Harsman and W.J. Smith, Eds., SPIE Press CR38 (1991) 153.        [ Links ]

46. P.P. Clark and C. Londoño, Opt. News (1989) 39.        [ Links ]

47. C.G. Blough, M. Rossi, S.K. Mack, and R.L. Michaels, Appl. Opt. 36 (1997) 4648.        [ Links ]

48. http://www.canon.com/camera-museum/tech/report/200106/report.html        [ Links ]

49. M. T. Postek, A. E. Vladar, S. N. Jones and W. J. Keery, J. Res. of Nat. Inst. Stan. & Tech. 98 (1993) 447.        [ Links ]

50. L.J. Lauchlan, D. Nyyssonen, and N. Sullivan, in Handbook of microlithography, "Micromachining and Microfabrication", Vol. 1: Microlithography, P. Rai-Choudhury, Ed., SPIE Press, Bellingham, W.A, (1997) 475.        [ Links ]

51. Williams and E. Fu., Proc. SPIE 2439 (1940 195).        [ Links ]

52. J.E. Greivenkamp and J.H. Bruning, in Optical Shop Testing, D. Malcara (Ed. Wiley, New York, 1992) 501.        [ Links ]

53. M.W. Farn and J.W. Goodman, I. Cindrich and S.H. Lee, Eds., Proc. SPIE 1211 (1990) 125.        [ Links ]

54. M.B. Stern, M. Holz, S.S. Medeiros and R.E. Knowlden, J Vac. Sci.Technol. B 9 (1991) 3117.        [ Links ]

55. J.M Miller, M.R. Taghizadeh, J. Turunen, and N. Ross, Appl. Opt. 32 (1993) 2519.        [ Links ]

56. D.A. Pommet, E.B. Grann, and M.G. Moharam, Appl. Opt. 34 (1995) 2430-2435.        [ Links ]

57. D.C. O'Shea et al., SPIE Tutorial Texts in Optical Engineering, TT62 2003.        [ Links ]

58. T.W. Stone and B J. Thompso, SPIE Optical Engineering Press, Vol. MS34, Washignton USA, 1991.        [ Links ]

59. K. Bergman, N. Bonadeo, I. Brener, and K. Chiang, in Design, Test, Integration, and Pack again of MEMS/MOEMS 2001, B. Courtoi et al., Eds., SPIE 4408 (2005) 2.        [ Links ]

60. E. Goldstein, L.Y Lin, and J. Walker, "Lightwave micromachines for optical networks," Opt. Photonics News (2001) 60.        [ Links ]

61. W. Goltsos and M. Holz, Opt. Eng. 29 (1990) 1392.        [ Links ]

62. M.E. Motamedi, A.P Andrews, W.J. Gunning, and M. Khoshnevisan, Opt. Eng. 33 (1994) 3616.        [ Links ]

63. F. Nickolajeff, S. Hard, and B. Curtis, Appl. Opt. 36 (1997) 8481.        [ Links ]

64. J.R. Leger, D. Chen, and G. Mowbry, Appl. Opt. 34 (1995) 2498.        [ Links ]

65. J.N. Mait and D.W. Phather (Eds.), Selected Papers of Subwavelength Diffractive Optics, MS 166, SPIE Press, Bellingham, WA (2001).        [ Links ]

66. O. García Lievanos and S. Vázquez-Montiel, Proceedings of SPIE 58750R (2005) 1.        [ Links ]

67. L. Castañeda, "Diseño de sistemas opticos con elementos hibridos y elementos difractivos", tesis de maestria, INAOE, Tonantzintla, 2002.        [ Links ]

68. J.A. Hernandez and S. Vázquez-Montiel, Optical design and analysis of a non-contact profiler using diffractive optical elements (DOEs) Proceedings of SPIE 58750S (2005) 1.        [ Links ]

69. D.A. Buralli and G.M. Morris, Appl. Opt. 28 (1989) 3950.        [ Links ]

70. D.A. Buralli and G.M. Morris, Appl. Opt. 31 (1992) 38.        [ Links ]

71. J.A. Futhey, M. Beal, and S. Saxe, in Annual Meeting, Vol. 17 of OSA Technical Digest Series. Optical Society of America, Washington, DC (1991).        [ Links ]

72. D. Fakilis and G.M. Morris, Appl. Opt. 34 (1995) 2462.        [ Links ]

73. J.M. Sasian and R.A. Chipman, Appl. Opt. 32 (1993) 60.        [ Links ]

74. A.P. Wood, Using hybrid refractive-diffractive elements in infrared Petzval objectives Proc. SPIE 1354 (1990) 316.        [ Links ]

75. W. Chen and S. Anderson, in Diffractive and Miniaturized Optics, S.H. Lee, Ed., CR 49. SPIE Press, Bellingham, W.A. (1993) 77.        [ Links ]

76. M.D. Missing and G.M. Morris, Appl. Opt. 34 (1995) 2452.        [ Links ]

77. J.R. Leger, D. Chen, and G. Mowry, Appl. Opt. 34 (1995) 2498.        [ Links ]

78. A.D. Kathman, W. Heyward, and S.W. Farnsworth, in Gradient Index, Miniature, and Diffractive Optical Systems, A.D. Kathman, Ed.,Proc. SPIE 3778 (1999) 104.        [ Links ]

79. M.M. Meyers, Proc. of SPIE 2689 1996.        [ Links ]

80. D. Faklis, Optics & Photonics News (1995).        [ Links ]

81. H.P Herzig, Design of Refractive and Diffractive optics Marte-llucci & Chester (Plenum Press, 1997).        [ Links ]

82. Lambda Research Corporation, OSLO Optics Software for Layout and Optimization, Optics Reference, Version 6.1, Littleton, MA, USA, 2001.        [ Links ]