SciELO - Scientific Electronic Library Online

 
vol.5 número2The Miler operational amplifier's settling responseA Discrete Wavelet Transform - Singular Value Decomposition system for image coding índice de autoresíndice de materiabúsqueda de artículos
Home Pagelista alfabética de revistas  

Servicios Personalizados

Revista

Articulo

Indicadores

Links relacionados

Compartir


Journal of applied research and technology

versión On-line ISSN 2448-6736versión impresa ISSN 1665-6423

J. appl. res. technol vol.5 no.2 Ciudad de México ago. 2007

 

Principal factors determination in the growth of thin films using Taguchi's technique

 

E. R. Vázquez-Cerón, V. R. Bárrales-Guadarrama, E. M. Rodríguez-Rodríguez, R. Barrales-Guadarrama.

 

UAM Azcapotzalco. Av. San Pablo # 180, Col. Reynosa, Azcapotzalco, 02200. México, D.F., México, Email: vrbg@correo.azc.uam.mx

 

Abstract

A methodology to improve the production and quality of deposited thin films has been developed for the PLD technique. The main purpose is the optimization of electrical and transport properties of the films through the characterization of growth parameters concerning some important characteristics of the material such as roughness, resistance, homogeneity, etc. It improves the production process of thin films, and it also decreases costs, conserving the quality at the same time. The use of interpolations and orthogonal arrangements allows to evaluate the growth parameters and to predict results eliminating the need to repeat experiments.

 

DESCARGAR ARTÍCULO EN FORMATO PDF

 

6. REFERENCES

[1] Phillip J. Ross, Taguchi Techniques for Quality Engineering, (Ed. McGraw-Hill, México),(1987).         [ Links ]

[2] K.Ishikawa, Guide to Quality Control,(Asian Productivity Organization, Tokyo, Japan, 1983).         [ Links ]

[3] R. E. Walpole y R. H. Myers, Probabilidad y Estadística, (Ed. McGraw-Hill, México), 624, (1992).         [ Links ]

[4] P. A. Redhead, The Physical Basis of Ultrahigh Vacuum, (Ed. Springer-Verlag New York), 2000.         [ Links ]

[5] Chrisey B., Douglas, Pulsed Laser Deposition of Thin Films, (ED. Wiley Interscience) 613, 1994.         [ Links ]

Creative Commons License Todo el contenido de esta revista, excepto dónde está identificado, está bajo una Licencia Creative Commons